MEMS and microsystems : design, manufacture, and nanoscale engineering /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Hoboken, New Jersey :
John Wiley & Sons, Inc.,
2008.
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| Edition: | Second edition |
| Subjects: |
| Item Description: | Incluye índice |
|---|---|
| Physical Description: | 550 páginas : ilustraciones, diagramas, gráficas, tablas. |
| Bibliography: | Referencias |
| ISBN: | 9780470083017 |