MEMS and microsystems : design, manufacture, and nanoscale engineering /

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MEMS and microsystems : design, manufacture, and nanoscale engineering /

Detalles Bibliográficos
Autor principal:	Hsu, Tai Ran
Formato:	Libro
Lenguaje:	English
Publicado:	Hoboken, New Jersey : John Wiley & Sons, Inc., 2008.
Edición:	Second edition
Materias:	Microelectrónica Ingeniería Diseño > Fabricación Nanotecnología Tecnología > Miniaturización Mecánica Libros

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