Chemical Vapour Deposition : An Integrated Engineering Design for Advanced Materials /
Main Authors: | , |
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Corporate Author: | |
Format: | eBook |
Language: | English |
Published: |
London :
Springer London : Imprint: Springer,
2010.
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Edition: | 1st ed. 2010. |
Series: | Engineering Materials and Processes,
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Subjects: |
Table of Contents:
- to Chemical Vapour Deposition
- Physical Fundamentals of Chemical Vapour Deposition
- Chemical Vapour Deposition Systems Design
- Thermodynamics and Kinetics of Chemical Vapour Deposition
- Chemical Vapour Infiltration
- Microstructure Evolution and Process Control.