Chemical Vapour Deposition : An Integrated Engineering Design for Advanced Materials /

Bibliographic Details
Main Authors: Yan, Xiu-Tian. (Author), Xu, Yongdong. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: London : Springer London : Imprint: Springer, 2010.
Edition:1st ed. 2010.
Series:Engineering Materials and Processes,
Subjects:
Table of Contents:
  • to Chemical Vapour Deposition
  • Physical Fundamentals of Chemical Vapour Deposition
  • Chemical Vapour Deposition Systems Design
  • Thermodynamics and Kinetics of Chemical Vapour Deposition
  • Chemical Vapour Infiltration
  • Microstructure Evolution and Process Control.