Introductory MEMS : Fabrication and Applications /

Bibliographic Details
Main Authors:	Adams, Thomas M. (Author), Layton, Richard A. (Author)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	New York, NY : Springer US : Imprint: Springer, 2010.
Edition:	1st ed. 2010.
Subjects:	Electronics. Microelectronics. Electronic circuits. Mechanics. Materials-Surfaces. Thin films. Mechanics, Applied. Electronics and Microelectronics, Instrumentation. Circuits and Systems. Classical Mechanics. Surfaces and Interfaces, Thin Films. Solid Mechanics.

Description
Physical Description:	XVI, 444 p. : online resource.
ISBN:	9780387095110

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