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100301s2010 xxu| s |||| 0|eng d |
| 020 |
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|a 9780387095110
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| 024 |
7 |
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|a 10.1007/978-0-387-09511-0
|2 doi
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| 040 |
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|a Sistema de Bibliotecas del Tecnológico de Costa Rica
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| 100 |
1 |
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|a Adams, Thomas M.
|e author.
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| 245 |
1 |
0 |
|a Introductory MEMS :
|b Fabrication and Applications /
|c by Thomas M. Adams, Richard A. Layton.
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| 250 |
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|a 1st ed. 2010.
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| 260 |
# |
# |
|a New York, NY :
|b Springer US :
|b Imprint: Springer,
|c 2010.
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| 300 |
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|a XVI, 444 p. :
|b online resource.
|
| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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| 505 |
0 |
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|a Fabrication -- The substrate and adding material to it -- Creating and transferring patterns#x2014;Photolithography -- Creating structures#x2014;Micromachining -- Solid mechanics -- Applications -- Thinking about modeling -- MEMS transducers#x2014;An overview of how they work -- Piezoresistive transducers -- Capacitive transducers -- Piezoelectric transducers -- Thermal transducers -- to microfluidics -- Laboratories -- Microfabrication laboratories.
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| 650 |
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0 |
|a Electronics.
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| 650 |
|
0 |
|a Microelectronics.
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| 650 |
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0 |
|a Electronic circuits.
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| 650 |
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0 |
|a Mechanics.
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| 650 |
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0 |
|a Materials-Surfaces.
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| 650 |
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0 |
|a Thin films.
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| 650 |
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0 |
|a Mechanics, Applied.
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| 650 |
1 |
4 |
|a Electronics and Microelectronics, Instrumentation.
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| 650 |
2 |
4 |
|a Circuits and Systems.
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| 650 |
2 |
4 |
|a Classical Mechanics.
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| 650 |
2 |
4 |
|a Surfaces and Interfaces, Thin Films.
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| 650 |
2 |
4 |
|a Solid Mechanics.
|
| 700 |
1 |
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|a Layton, Richard A.
|e author.
|
| 710 |
2 |
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|a SpringerLink (Online service)
|
| 773 |
0 |
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|t Springer eBooks
|