Introductory MEMS : Fabrication and Applications /
| Main Authors: | , |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
New York, NY :
Springer US : Imprint: Springer,
2010.
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| Edition: | 1st ed. 2010. |
| Subjects: |
Table of Contents:
- Fabrication
- The substrate and adding material to it
- Creating and transferring patterns#x2014;Photolithography
- Creating structures#x2014;Micromachining
- Solid mechanics
- Applications
- Thinking about modeling
- MEMS transducers#x2014;An overview of how they work
- Piezoresistive transducers
- Capacitive transducers
- Piezoelectric transducers
- Thermal transducers
- to microfluidics
- Laboratories
- Microfabrication laboratories.