Introductory MEMS : Fabrication and Applications /
| Autores principales: | , |
|---|---|
| Autor Corporativo: | |
| Formato: | eBook |
| Lenguaje: | English |
| Publicado: |
New York, NY :
Springer US : Imprint: Springer,
2010.
|
| Edición: | 1st ed. 2010. |
| Materias: |
Tabla de Contenidos:
- Fabrication
- The substrate and adding material to it
- Creating and transferring patterns#x2014;Photolithography
- Creating structures#x2014;Micromachining
- Solid mechanics
- Applications
- Thinking about modeling
- MEMS transducers#x2014;An overview of how they work
- Piezoresistive transducers
- Capacitive transducers
- Piezoelectric transducers
- Thermal transducers
- to microfluidics
- Laboratories
- Microfabrication laboratories.