Nanoimprint Lithography: An Enabling Process for Nanofabrication /
| Autor principal: | |
|---|---|
| Autor Corporativo: | |
| Formato: | eBook |
| Lenguaje: | English |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2013.
|
| Edición: | 1st ed. 2013. |
| Materias: |
Tabla de Contenidos:
- Principles and statues of nanoimprint lithography
- Stamp Fabrication
- stamp surface treatment
- Nanoimprint lithography resists
- Nanoimprint lithography process
- Modeling and Simulation of NIL
- Application of NIL in Light emitting Diodes
- Application of NIL in memory devices
- Application of NIL in solar cell.