Nanoimprint Lithography: An Enabling Process for Nanofabrication /
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2013.
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| Edition: | 1st ed. 2013. |
| Subjects: |
Table of Contents:
- Principles and statues of nanoimprint lithography
- Stamp Fabrication
- stamp surface treatment
- Nanoimprint lithography resists
- Nanoimprint lithography process
- Modeling and Simulation of NIL
- Application of NIL in Light emitting Diodes
- Application of NIL in memory devices
- Application of NIL in solar cell.