Piezoresistor Design and Applications /

Bibliographic Details
Main Authors: Doll, Joseph C. (Author), Pruitt, Beth L. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer New York : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Series:Microsystems and Nanosystems,
Subjects:
Table of Contents:
  • Introduction
  • Piezoresistance fundamentals
  • Sensitivity, noise and resolution
  • Fabrication and process modeling
  • Temperature effects
  • Design optimization
  • Alternative materials and transduction methods.