Into The Nano Era Moore's Law Beyond Planar Silicon CMOS /
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| Format: | eBook | 
| Language: | English | 
| Published: | 
      Berlin, Heidelberg :
        Springer Berlin Heidelberg : Imprint: Springer,
    
      2009.
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| Edition: | 1st ed. 2009. | 
| Series: | Springer Series in Materials Science,
              106             | 
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| Online Access: | https://doi.org/10.1007/978-3-540-74559-4 | 
| Physical Description: | XXVIII, 348 p. 136 illus. online resource. | 
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| ISBN: | 9783540745594 |