Handbook of thin-film deposition processes and techniques : principles, methods, equipment, and applications /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New Jersey :
Noyes,
c1988.
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| Series: | Materials Science and Process Technology Series
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| Subjects: |
| Physical Description: | xvii, 413 páginas : ilustraciones. |
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| ISBN: | 0815511531 |