Thin-film deposition : principles and practice /

Bibliographic Details
Main Author:	Smith, Donald L. 1953- (Author, Autor/a)
Format:	Book
Language:	English
Published:	Boston : McGraw-Hill, c1995.
Subjects:	ELECTROMETALURGIA PELICULAS DELGADAS SEMICONDUCTORES

Description
Physical Description:	xxiii, 616 páginas : ilustraciones
ISBN:	9780070585027

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