Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /
Main Author: | |
---|---|
Other Authors: | , |
Format: | Book |
Language: | English |
Published: |
Park Ridge, N.J. :
Noyes,
C1989.
|
Subjects: |
Physical Description: | xviii, 438 páginas : ilustraciones |
---|---|
ISBN: | 081551199X |