Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /

Bibliographic Details
Main Author: Cuomo, Jerome J. (Editor)
Other Authors: Rossnagel, Stephen M (Editor, Editor/a), Kaufman, Harold R. (Editor, Editor/a)
Format: Book
Language:English
Published: Park Ridge, N.J. : Noyes, C1989.
Subjects:
Description
Physical Description:xviii, 438 páginas : ilustraciones
ISBN:081551199X