Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis /
Main Author: | Cuomo, Jerome J. (Editor) |
---|---|
Other Authors: | Rossnagel, Stephen M (Editor, Editor/a), Kaufman, Harold R. (Editor, Editor/a) |
Format: | Book |
Language: | English |
Published: |
Park Ridge, N.J. :
Noyes,
C1989.
|
Subjects: |
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