Introductory MEMS : Fabrication and Applications /

Introductory MEMS : Fabrication and Applications /

Detalles Bibliográficos
Autores principales: Adams, Thomas M. (Autor), Layton, Richard A. (Autor)
Autor Corporativo: SpringerLink (Online service)
Formato: eBook
Lenguaje:English
Publicado: New York, NY : Springer US : Imprint: Springer, 2010.
Edición:1st ed. 2010.
Materias:
Electronics.
Microelectronics.
Electronic circuits.
Mechanics.
Materials—Surfaces.
Thin films.
Mechanics, Applied.
Electronics and Microelectronics, Instrumentation.
Circuits and Systems.
Classical Mechanics.
Surfaces and Interfaces, Thin Films.
Solid Mechanics.

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