Ion Beams in Materials Processing and Analysis /

Bibliographic Details
Main Authors:	Schmidt, Bernd. (Author), Wetzig, Klaus. (Author)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Vienna : Springer Vienna : Imprint: Springer, 2013.
Edition:	1st ed. 2013.
Subjects:	Materials-Surfaces. Thin films. Atoms. Physics. Surfaces (Physics). Interfaces (Physical sciences). Surfaces and Interfaces, Thin Films. Atomic, Molecular, Optical and Plasma Physics. Surface and Interface Science, Thin Films.

Description
Physical Description:	IX, 418 p. : online resource.
ISBN:	9783211993569

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