Ion Beams in Materials Processing and Analysis /
| Autores principales: | , |
|---|---|
| Autor Corporativo: | |
| Formato: | eBook |
| Lenguaje: | English |
| Publicado: |
Vienna :
Springer Vienna : Imprint: Springer,
2013.
|
| Edición: | 1st ed. 2013. |
| Materias: |
Tabla de Contenidos:
- Preface
- 1. Introduction
- 2. Ion- Solid Interactions
- 2.1 Fundamental Principles
- 2.2 Binary Elastic Collisions
- 2.3 Ion Stopping
- 2.4 Ion Channeling
- 2.5 Ion Induced Target Modifications
- 3. Ion Beam Technology
- 3.1 Principles of Ion Accelerators
- 3.2 Ion Sources
- 3.3 Ion Acceleration
- 3.4 Ion Beam Handling
- 3.5 Ion Implantation Systems
- 3.6 Electrostatic Ion Accelerator Systems
- 3.7 Focused Ion Beam Systems
- 4. Materials Processing
- 4.1 Ion Irradiation Effects in Crystalline Materials
- 4.2 Ion Implantation into Semiconductors
- 4.3 Ion Beam Synthesis of New Phases in Solids
- 4.4 Ion Beam Mixing of Interfaces
- 4.5 Ion Beam Slicing of Thin Layers (Smart-Cut for SOI and Solar Cells)
- 4.6 Ion Beam Erosion, Sputtering and Surface Patterning (Ripples and Dots)
- 4.7 Ion Beam Shaping of Nanomaterials
- 4.8 Ion Beam Processing of other Materials
- 5. Ion Beam Preparation of Materials
- 5.1 Removal of Target Atoms by Sputtering
- 5.2 Effects on Sputtering Yield
- 5.3 Preparation Steps by Ion Beam Irradiation
- 5.4 Focus Ion Beam (FIB) Preparation
- 6. Ion Beam Analysis by Ion Beams
- 6.1 Introduction
- 6.2 Ion Beam Analytical Techniques – a Survey
- 6.3 Ion Beam Scattering Techniques
- 6.4 Ion Beam Induced Photon Emission
- 6.5 Nuclear Reaction Analysis (NRA)
- 6.6 Ion Beam Induced Electron and Light Emission
- 6.7 Secondary Ion Emission
- 6.8 Ion Beam Imaging Techniques
- 7. Special Ion Beam Applications in Materials Analysis Problems
- 7.1 Functional Thin Films and Layers
- 7.2 Ion Beam Analysis in Art and Archeometry
- 7.3 Special Applications in Life Sciences
- Index.