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Silicon Devices and Process Integration : Deep Submicron and Nano-Scale Technologies /

Silicon Devices and Process Integration : Deep Submicron and Nano-Scale Technologies /

Bibliographic Details
Main Author: El-Kareh, Badih. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2009.
Edition:1st ed. 2009.
Subjects:
Electronic circuits.
Electronics.
Microelectronics.
Electrical engineering.
Materials science.
Circuits and Systems.
Electronics and Microelectronics, Instrumentation.
Electrical Engineering.
Materials Science, general.
Description
Physical Description:XXVI, 598 p. : online resource.
ISBN:9780387690100

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