Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS /

Handbook of sputter deposition technology : fundamentals and applications for functional thin films, nanomaterials and MEMS /

Bibliographic Details
Other Authors: Wasa, Kiyotaka (Editor), Kanno, Isaku (Editor), Kotera, Hidetoshi (Editor), Adachi, Hideaki (creador), Hata, Tomonobu (creador), Matsushima, Tomoaki (creador), Motohiro, Tomoyoshi (creador), Tominaga, Kikuo (creador)
Format: Book
Language:English
Published: Ámsterdam : William Andrew Publishing, 2012.
Edition:Second Edition
Subjects:
Tecnología de deposición
Nanomateriales
Simulación por computadoras
Factores de conversión
Símbolos
Pulverización
Dispositivos innovadores
Libros electrónicos
Manuales

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