Atomic layer deposition : principles, characteristics, and nanotechnology applications /

Bibliographic Details
Other Authors:	Kääriäinen, Tommi (creador), Cameron, David (creador), Kääriäinen, Marja Leena (creadora), Sherman, Arthur (creador)
Format:	Book
Language:	English
Published:	2013.
Edition:	Second Edition
Subjects:	Aplicaciones de la nanotecnología Tecnología de deposición Materiales orgánicos Películas > Semiconductores Metales Materiales híbridos Libros electrónicos

Table of Contents:

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