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|a 0815511361
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|a 9220149
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|a Sistema de Bibliotecas de Universidad de Costa Rica
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|a spa
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|a 621.381.5
|b S553ch
|2 22
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|a Sherman, Arthur
|e Autor/a
|4 aut
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|a Chemical vapor deposition for microelectronics :
|b principles, technology, and applications /
|c by Arthur Sherman
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| 260 |
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|a Park Ridge, N.J. :
|b Noyes,
|c c1987.
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| 300 |
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|a xi, 215 páginas :
|b ilustraciones
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| 490 |
0 |
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|a Materials Science and Process Technology Series
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| 650 |
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|a SEMICONDUCTORES
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| 650 |
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|a CIRCUITOS INTEGRADOS
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| 650 |
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|a PLACAS (INGENIERIA)
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| 900 |
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|a 2009
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|a 11-MAY-2009 - SANCHEZ VELASQUEZ, AURA
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|a 24-FEB-2009 - BUSTAMANTE MORA, CYNTHIA
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| 949 |
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|a ASV -EMQ
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| 916 |
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|a Centro Catalográfico
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