Chemical vapor deposition for microelectronics : principles, technology, and applications /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | Spanish |
| Published: |
Park Ridge, N.J. :
Noyes,
c1987.
|
| Series: | Materials Science and Process Technology Series
|
| Subjects: |
Sistema de Bibliotecas de Universidad de Costa Rica
| Call Number: |
621.381.5 |
|---|---|
| Copy | Available |