Thin film materials technology : sputtering of compound materials /

Bibliographic Details
Main Authors:	Wasa, Kiyotaka (Author, Autor/a), Kitabatake, Makoto (Autor/a), Adachi, Hideaki (Autor/a)
Format:	Book
Language:	English
Published:	Norwich NY : W. Andrew, c2004.
Subjects:	PULVERIZACION CATODICA (METALIZACION) PELICULAS DELGADAS

Description
Physical Description:	xiv, 518 páginas : ilustraciones
ISBN:	0815514832

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