Thin film materials technology : sputtering of compound materials /
Autores principales: | Wasa, Kiyotaka (Autor, Autor/a), Kitabatake, Makoto (Autor/a), Adachi, Hideaki (Autor/a) |
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Formato: | Libro |
Lenguaje: | English |
Publicado: |
Norwich NY :
W. Andrew,
c2004.
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Materias: |
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