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20110720143301.0 |
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950527s1992 gw ||||| eng |
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|a 3540540571
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|a 27903
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|a Sistema de Bibliotecas de la Universidad de Costa Rica
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|a eng
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|a 621.381.7
|b K82f
|2 00
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|a Konuma, Mitsuharu
|e Autor/a
|4 aut
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|a Film deposition by plasma techniques /
|c Mitsuharu Konuma. --
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| 260 |
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|a Berlín :
|b Springer,
|c c1992.
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| 300 |
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|a ix, 224 páginas :
|b ilustraciones ;
|c 24 cm.--
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|a Springer series on atoms and plasmas / editors, G. Ecker ... [et al.]
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| 500 |
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|a Incluye indice.
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| 504 |
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|a Bibliografia : p. 195-220.
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| 650 |
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|a PELICULAS DELGADAS
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| 949 |
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|a AE-IR b AE
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| 916 |
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|a Registros del LS-2000
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