Introduction to focused ion beam nanometrology /
Main Author: | Cox, David Christopher 1965- (Autor/a) |
---|---|
Format: | Book |
Language: | English |
Published: |
San Rafael, CA :
Morgan & Claypool Publishers,
c2015.
|
Series: | IOP Concise Physics
|
Subjects: | |
Online Access: | Ver documento en línea |
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