Helium Ion Microscopy : Principles and Applications /

Bibliographic Details
Main Author:	Joy, David C. (Author)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	New York, NY : Springer New York : Imprint: Springer, 2013.
Edition:	1st ed. 2013.
Series:	SpringerBriefs in Materials,
Subjects:	Materials science. Spectroscopy. Microscopy. Nanotechnology. Nanoscale science. Nanoscience. Nanostructures. Characterization and Evaluation of Materials. Spectroscopy and Microscopy. Spectroscopy/Spectrometry. Nanoscale Science and Technology.

Table of Contents:

Chapter 1: Introduction to Helium Ion Microscopy
Chapter 2: Microscopy with Ions - A brief history
Chapter 3: Operating the Helium Ion Microscope
Chapter 4: Ion -Solid Interactions and Image Formation
Chapter 5: Charging and Damage
Chapter 6: Microanalysis with the HIM
Chapter 7: Ion Generated Damage
Chapter 8: Working with other Ion beams
Chapter 9: Patterning and Nanofabrication
Conclusion
Bibliography
Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds
Index.

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