Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing /

Detalles Bibliográficos
Autor principal:	Gao, Wei. (Autor)
Autor Corporativo:	SpringerLink (Online service)
Formato:	eBook
Lenguaje:	English
Publicado:	London : Springer London : Imprint: Springer, 2010.
Edición:	1st ed. 2010.
Colección:	Springer Series in Advanced Manufacturing,
Materias:	Nanotechnology. Surfaces (Physics). Interfaces (Physical sciences). Thin films. Control engineering. Robotics. Mechatronics. Manufactures. Physical measurements. Measurement . Nanotechnology and Microengineering. Surface and Interface Science, Thin Films. Control, Robotics, Mechatronics. Manufacturing, Machines, Tools, Processes. Measurement Science and Instrumentation.

Descripción
Descripción Física:	XIII, 354 p. : online resource.
ISBN:	9781849962544

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