Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing /

Detalles Bibliográficos
Autor principal:	Gao, Wei. (Autor)
Autor Corporativo:	SpringerLink (Online service)
Formato:	eBook
Lenguaje:	English
Publicado:	London : Springer London : Imprint: Springer, 2010.
Edición:	1st ed. 2010.
Colección:	Springer Series in Advanced Manufacturing,
Materias:	Nanotechnology. Surfaces (Physics). Interfaces (Physical sciences). Thin films. Control engineering. Robotics. Mechatronics. Manufactures. Physical measurements. Measurement . Nanotechnology and Microengineering. Surface and Interface Science, Thin Films. Control, Robotics, Mechatronics. Manufacturing, Machines, Tools, Processes. Measurement Science and Instrumentation.

Tabla de Contenidos:

Angle Sensor for Measurement of Surface Slope and Tilt Motion
Laser Autocollimator for Measurement of Multi-axis Tilt Motion
Surface Encoder for Measurement of In-plane Motion
Grating Encoder for Measurement of In-plane and Out-of-plane Motion
Scanning Multi-probe System for Measurement of Roundness
Scanning Error Separation System for Measurement of Straightness
Scanning Micro-stylus System for Measurement of Micro-aspherics
Large Area Scanning Probe Microscope for Micro-textured Surfaces
Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures
Scanning Image-sensor System for Measurement of Micro-dimensions.

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