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02282nam a22004575i 4500 |
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000289374 |
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20210531142003.0 |
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cr nn 008mamaa |
| 008 |
100611s2010 xxk| s |||| 0|eng d |
| 020 |
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|a 9781849962544
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| 024 |
7 |
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|a 10.1007/978-1-84996-254-4
|2 doi
|
| 040 |
|
|
|a Sistema de Bibliotecas del Tecnológico de Costa Rica
|
| 100 |
1 |
|
|a Gao, Wei.
|e author.
|
| 245 |
1 |
0 |
|a Precision Nanometrology :
|b Sensors and Measuring Systems for Nanomanufacturing /
|c by Wei Gao.
|
| 250 |
|
|
|a 1st ed. 2010.
|
| 260 |
# |
# |
|a London :
|b Springer London :
|b Imprint: Springer,
|c 2010.
|
| 300 |
|
|
|a XIII, 354 p. :
|b online resource.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
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|a computer
|b c
|2 rdamedia
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| 338 |
|
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|a online resource
|b cr
|2 rdacarrier
|
| 490 |
1 |
|
|a Springer Series in Advanced Manufacturing,
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| 505 |
0 |
|
|a Angle Sensor for Measurement of Surface Slope and Tilt Motion -- Laser Autocollimator for Measurement of Multi-axis Tilt Motion -- Surface Encoder for Measurement of In-plane Motion -- Grating Encoder for Measurement of In-plane and Out-of-plane Motion -- Scanning Multi-probe System for Measurement of Roundness -- Scanning Error Separation System for Measurement of Straightness -- Scanning Micro-stylus System for Measurement of Micro-aspherics -- Large Area Scanning Probe Microscope for Micro-textured Surfaces -- Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures -- Scanning Image-sensor System for Measurement of Micro-dimensions.
|
| 650 |
|
0 |
|a Nanotechnology.
|
| 650 |
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0 |
|a Surfaces (Physics).
|
| 650 |
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0 |
|a Interfaces (Physical sciences).
|
| 650 |
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0 |
|a Thin films.
|
| 650 |
|
0 |
|a Control engineering.
|
| 650 |
|
0 |
|a Robotics.
|
| 650 |
|
0 |
|a Mechatronics.
|
| 650 |
|
0 |
|a Manufactures.
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| 650 |
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0 |
|a Physical measurements.
|
| 650 |
|
0 |
|a Measurement .
|
| 650 |
1 |
4 |
|a Nanotechnology and Microengineering.
|
| 650 |
2 |
4 |
|a Surface and Interface Science, Thin Films.
|
| 650 |
2 |
4 |
|a Control, Robotics, Mechatronics.
|
| 650 |
2 |
4 |
|a Manufacturing, Machines, Tools, Processes.
|
| 650 |
2 |
4 |
|a Measurement Science and Instrumentation.
|
| 650 |
2 |
4 |
|a Nanotechnology.
|
| 710 |
2 |
|
|a SpringerLink (Online service)
|
| 773 |
0 |
|
|t Springer eBooks
|
| 900 |
|
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|a Libro descargado a ALEPH en bloque (proveniente de proveedor)
|