Reactive Sputter Deposition
| Corporate Author: | |
|---|---|
| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2008.
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| Edition: | 1st ed. 2008. |
| Series: | Springer Series in Materials Science,
109 |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/978-3-540-76664-3 |