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01709nam a22003975i 4500 |
| 001 |
978-3-540-85849-2 |
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20191022101922.0 |
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cr nn 008mamaa |
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100301s2009 gw | s |||| 0|eng d |
| 020 |
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|a 9783540858492
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7 |
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|a 10.1007/978-3-540-85849-2
|2 doi
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| 040 |
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|a Sistema de Bibliotecas del Tecnológico de Costa Rica
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| 100 |
1 |
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|a Franz, Gerhard.
|e author.
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1 |
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|a Low Pressure Plasmas and Microstructuring Technology
|c by Gerhard Franz.
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| 250 |
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|a 1st ed. 2009.
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| 260 |
# |
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|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2009.
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| 300 |
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|a XXIV, 732 p. 422 illus.
|b online resource.
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| 336 |
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|a text
|b txt
|2 rdacontent
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| 337 |
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|a computer
|b c
|2 rdamedia
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| 338 |
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|a online resource
|b cr
|2 rdacarrier
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|a Collisions and cross sections -- The plasma -- DC discharges -- High-frequency discharges I -- High-frequency discharges II -- High-frequency discharges III -- Ion beam systems -- Plasma diagnostics -- Plasma deposition processes -- Plasma etch processes -- Etch Mechanisms -- Outlook -- Advanced Topics.
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| 650 |
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|a Optical materials.
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| 650 |
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|a Electronic materials.
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| 650 |
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|a Electronics.
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| 650 |
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|a Microelectronics.
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| 650 |
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|a Materials—Surfaces.
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| 650 |
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|a Thin films.
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| 650 |
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|a Atomic structure .
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| 650 |
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|a Molecular structure .
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| 650 |
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4 |
|a Optical and Electronic Materials.
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| 650 |
2 |
4 |
|a Electronics and Microelectronics, Instrumentation.
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| 650 |
2 |
4 |
|a Surfaces and Interfaces, Thin Films.
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| 650 |
2 |
4 |
|a Atomic/Molecular Structure and Spectra.
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| 710 |
2 |
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|a SpringerLink (Online service)
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| 773 |
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|t Springer eBooks
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| 856 |
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|u https://doi.org/10.1007/978-3-540-85849-2
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