Low Pressure Plasmas and Microstructuring Technology
Autor principal: | Franz, Gerhard. (Autor) |
---|---|
Autor Corporativo: | SpringerLink (Online service) |
Formato: | eBook |
Lenguaje: | English |
Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2009.
|
Edición: | 1st ed. 2009. |
Materias: | |
Acceso en línea: | https://doi.org/10.1007/978-3-540-85849-2 |
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