Low Pressure Plasmas and Microstructuring Technology
Autor principal: | |
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Autor Corporativo: | |
Formato: | eBook |
Lenguaje: | English |
Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2009.
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Edición: | 1st ed. 2009. |
Materias: | |
Acceso en línea: | https://doi.org/10.1007/978-3-540-85849-2 |
Tabla de Contenidos:
- Collisions and cross sections
- The plasma
- DC discharges
- High-frequency discharges I
- High-frequency discharges II
- High-frequency discharges III
- Ion beam systems
- Plasma diagnostics
- Plasma deposition processes
- Plasma etch processes
- Etch Mechanisms
- Outlook
- Advanced Topics.