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01067nam a2200313uu 4500 |
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091111s1997 xxu ||||| eng |
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|a 0471138274
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|a 9246683
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|a Sistema de Bibliotecas de la Universidad de Costa Rica
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|a eng
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| 082 |
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|a 621.381.5
|b S818ch
|2 22
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1 |
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|a Steigerwald, Joseph M.
|e Autor/a
|4 aut
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| 245 |
1 |
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|a Chemical mechanical planarization of microelectronic materials /
|c Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann
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| 260 |
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|a New York :
|b John Wiley,
|c c1997.
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| 300 |
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|a xiii, 324 páginas :
|b ilustraciones
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| 650 |
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|a MICROELECTRONICA
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| 650 |
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|a CERAMICA
|x MATERIALES
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| 650 |
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|a SEMICONDUCTORES
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| 650 |
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|a DISPOSITIVOS ELECTROMECANICOS
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| 650 |
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|a ESMERILADO
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| 700 |
1 |
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|a Murarka, Shyam P.
|e Autor/a
|4 aut
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| 700 |
1 |
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|a Gutmann, Ronald J.
|e Autor/a
|4 aut
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| 900 |
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|a 2009
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| 912 |
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|a 20-NOV-2009 - GARRIDO CORDERO, IRINA
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| 917 |
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|a 11-NOV-2009 - BUSTAMANTE MORA, CYNTHIA
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| 949 |
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|a IG -EMQ
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| 916 |
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|a Centro Catalográfico
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