Chemical mechanical planarization of microelectronic materials /

Chemical mechanical planarization of microelectronic materials /

Bibliographic Details
Main Authors: Steigerwald, Joseph M. (Author, Autor/a), Murarka, Shyam P. (Autor/a), Gutmann, Ronald J. (Autor/a)
Format: Book
Language:English
Published: New York : John Wiley, c1997.
Subjects:
MICROELECTRONICA
CERAMICA > MATERIALES
SEMICONDUCTORES
DISPOSITIVOS ELECTROMECANICOS
ESMERILADO

Sistema de Bibliotecas de Universidad de Costa Rica

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Call Number: 621.381.5
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