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01053nam a2200313uu 4500 |
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20101209094859.0 |
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101029s1997 xxu ||||| eng |
| 035 |
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|a 9277337
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|a Sistema de Bibliotecas de la Universidad de Costa Rica
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| 041 |
0 |
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|a eng
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| 082 |
0 |
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|a 670.42
|b H236h
|2 22
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| 100 |
1 |
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|a Rai-Choudhury, Prosenjit
|e Editor/a
|4 edt
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| 245 |
1 |
0 |
|a Handbook of microlithography, micromachining, and microfabrication /
|c P. Rai-Choudhury, editor
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| 260 |
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|a Bellingham, Wash. :
|b Spie Optical Engineering,
|c c1997-.
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| 300 |
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|a 2 volúmenes :
|b ilustraciones
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| 490 |
0 |
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|a IEE materials and devices series ;
|v 12)
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| 650 |
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|a INGENIERÍA DE LA PRODUCCIÓN
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| 650 |
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|a MICROLITOGRAFIA
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| 650 |
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|a MICROMECANIZADO
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| 650 |
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|a MICROFABRICACION
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| 650 |
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|v MANUALES
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| 650 |
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|a NANOTECNOLOGIA
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| 650 |
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|a ELECTRONICA INDUSTRIAL
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| 900 |
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|a 2010 dic
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| 912 |
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|a 09-DEC-2010 - BERMUDEZ RUIZ, AURORA
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| 917 |
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|a 29-OCT-2010 - BUSTAMANTE MORA, CYNTHIA
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| 949 |
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|a ABR -ABR
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| 916 |
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|a Centro Catalográfico
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