Handbook of microlithography, micromachining, and microfabrication /
| Autor principal: | |
|---|---|
| Formato: | Libro |
| Lenguaje: | English |
| Publicado: |
Bellingham, Wash. :
Spie Optical Engineering,
c1997-.
|
| Colección: | IEE materials and devices series ;
12) |
| Materias: |