Film deposition by plasma techniques /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlín :
Springer,
c1992.
|
| Series: | Springer series on atoms and plasmas / editors, G. Ecker ... [et al.]
|
| Subjects: |
Sistema de Bibliotecas de Universidad de Costa Rica
| Call Number: |
621.381.7 |
|---|---|
| Copy | Available |