Handbook of microlithography, micromachining, and microfabrication /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash. :
Spie Optical Engineering,
c1997-.
|
| Series: | IEE materials and devices series ;
12) |
| Subjects: |
Sistema de Bibliotecas de Universidad de Costa Rica
| Call Number: |
670.42 |
|---|---|
| Copy | Available |