Wafer Level 3-D ICs Process Technology

Wafer Level 3-D ICs Process Technology

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Tan, Chuan Seng. (Editor), Gutmann, Ronald J. (Editor), Reif, L. Rafael. (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2008.
Edition:1st ed. 2008.
Series:Integrated Circuits and Systems,
Subjects:
Electronics.
Microelectronics.
Optical materials.
Electronic materials.
Materials-Surfaces.
Thin films.
Engineering.
Electronics and Microelectronics, Instrumentation.
Optical and Electronic Materials.
Surfaces and Interfaces, Thin Films.
Engineering, general.
Online Access:https://doi.org/10.1007/978-0-387-76534-1
Table of Contents:
  • Overview of Wafer-Level 3D ICs
  • Monolithic 3D Integrated Circuits
  • Stacked CMOS Technologies
  • Wafer-Bonding Technologies and Strategies for 3D ICs
  • Through-Silicon Via Fabrication, Backgrind, and Handle Wafer Technologies
  • Cu Wafer Bonding for 3D IC Applications
  • Cu/Sn Solid#x2013;Liquid Interdiffusion Bonding
  • An SOI-Based 3D Circuit Integration Technology
  • 3D Fabrication Options for High-Performance CMOS Technology
  • 3D Integration Based upon Dielectric Adhesive Bonding
  • Direct Hybrid Bonding
  • 3D Memory
  • Circuit Architectures for 3D Integration
  • Thermal Challenges of 3D ICs
  • Status and Outlook.

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