Reactive Sputter Deposition

Reactive Sputter Deposition

Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Depla, Diederik. (Editor), Mahieu, Stijn. (Editor)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2008.
Edition:1st ed. 2008.
Series:Springer Series in Materials Science, 109
Subjects:
Materials-Surfaces.
Thin films.
Condensed matter.
Physical chemistry.
Chemical engineering.
Surfaces and Interfaces, Thin Films.
Condensed Matter Physics.
Physical Chemistry.
Industrial Chemistry/Chemical Engineering.
Online Access:https://doi.org/10.1007/978-3-540-76664-3
Description
Physical Description:XVIII, 572 p. online resource.
ISBN:9783540766643

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