Low Pressure Plasmas and Microstructuring Technology

Bibliographic Details
Main Author:	Franz, Gerhard. (Author)
Corporate Author:	SpringerLink (Online service)
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2009.
Edition:	1st ed. 2009.
Subjects:	Optical materials. Electronic materials. Electronics. Microelectronics. Materials-Surfaces. Thin films. Atomic structure . Molecular structure . Optical and Electronic Materials. Electronics and Microelectronics, Instrumentation. Surfaces and Interfaces, Thin Films. Atomic/Molecular Structure and Spectra.
Online Access:	https://doi.org/10.1007/978-3-540-85849-2

Description
Physical Description:	XXIV, 732 p. 422 illus. online resource.
ISBN:	9783540858492

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