Low Pressure Plasmas and Microstructuring Technology

Low Pressure Plasmas and Microstructuring Technology

Bibliographic Details
Main Author: Franz, Gerhard. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2009.
Edition:1st ed. 2009.
Subjects:
Optical materials.
Electronic materials.
Electronics.
Microelectronics.
Materials-Surfaces.
Thin films.
Atomic structure  .
Molecular structure .
Optical and Electronic Materials.
Electronics and Microelectronics, Instrumentation.
Surfaces and Interfaces, Thin Films.
Atomic/Molecular Structure and Spectra.
Online Access:https://doi.org/10.1007/978-3-540-85849-2
Description
Physical Description:XXIV, 732 p. 422 illus. online resource.
ISBN:9783540858492

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