PVD for microelectronics : sputter deposition applied to semiconductor manufacturing /
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
San Diego :
Academic Press,
c1999.
|
| Series: | Thin films ;
v. 26) |
| Subjects: |
| Physical Description: | xiii, 419 páginas : ilustraciones |
|---|---|
| ISBN: | 012533026X |