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00929nam a2200265 u 4500 |
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20020204092300.0 |
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010918s1999 xxw ||||| eng |
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|a 012533026X
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|a 6624683
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|a Sistema de Bibliotecas de la Universidad de Costa Rica
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|a eng
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|a 621.381.52
|b P885P
|2 21
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1 |
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|a Powell, Ronald A.
|e Autor/a
|4 aut
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| 245 |
1 |
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|a PVD for microelectronics :
|b sputter deposition applied to semiconductor manufacturing /
|c Ronald A. Powell, Stephen M. Rossnagel
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| 260 |
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|a San Diego :
|b Academic Press,
|c c1999.
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| 300 |
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|a xiii, 419 páginas :
|b ilustraciones
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| 490 |
0 |
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|a Thin films ;
|v v. 26)
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| 650 |
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|a SEMICONDUCTORES
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| 650 |
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|a PELICULAS DELGADAS
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| 700 |
1 |
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|a Rossnagel, Stephen M
|e Autor/a
|4 aut
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| 912 |
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|a 04-FEB-2002 - ROJAS ROJAS, IRENE
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| 917 |
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|a 18-SEP-2001 - JIMENEZ VELASCO, MARTA SYLIA
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| 949 |
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|a b/IR
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| 916 |
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|a Centro Catalográfico
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