PVD for microelectronics : sputter deposition applied to semiconductor manufacturing /
| Main Authors: | , |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
San Diego :
Academic Press,
c1999.
|
| Series: | Thin films ;
v. 26) |
| Subjects: |
Sistema de Bibliotecas de Universidad de Costa Rica
| Call Number: |
621.381.52 |
|---|---|
| Copy | Available |