Silicon Devices and Process Integration : Deep Submicron and Nano-Scale Technologies /
Main Author: | El-Kareh, Badih. (Author) |
---|---|
Corporate Author: | SpringerLink (Online service) |
Format: | eBook |
Language: | English |
Published: |
New York, NY :
Springer US : Imprint: Springer,
2009.
|
Edition: | 1st ed. 2009. |
Subjects: |
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